Precision Wafer Probing
Our sophisticated wafer probe stations facilitate reliable failure analysis and device characterisation. We provide manual or semi-automatic systems designed to support wafers up to 300mm in diameter.
Each system integrates with tailored accessories, from vibration tables to thermal chucks and control software. Our platforms remain modular, allowing your business to upgrade as your semiconductor testing requirements evolve.
200mm and 300mm Semi-Automatic Units
A flexible semi-automatic solution for 200mm and 300mm wafers, ideal for RF, high voltage, and low leakage testing. Operates across a range of -60°C to +400°C.
Key features:
- Support for 200mm and 300mm wafers
- Motorised or manual positioning systems
- Integration for cantilever probe cards
- Precision microscope mounting options
- Custom software for automated testing
High Voltage 200mm Semi-Automatic Probing
Engineered for power semiconductor evaluation, this system ensures precise Kelvin measurements and low contact resistance. It includes comprehensive safety protocols for high voltage workflows.
Key features:
- High current DC and pulsed testing
- Four-point Kelvin sensing capabilities
- Minimal resistance on reverse side contact
- Secure high voltage and low leakage testing
- Designed for thin wafer handling
- Seamless test instrument integration
Manual Probing: 200mm and 300mm Tools
A dependable manual platform for 200mm and 300mm wafers, offering cost-effective failure analysis and process verification with high stability.
Key features:
- Partial or full wafer support to 300mm
- Wide thermal range from -60°C to +400°C
- Ergonomic front controls for fine tuning
- Shielded environmental enclosure options
- Compatibility with multiple probe types
Compact Manual Probing Systems
An entry-level 200mm manual prober that is simple to operate yet fully expandable. It provides an efficient entry point for semiconductor device characterisation.
Key features:
- Supports wafers up to 200mm
- XY stage with precise theta rotation
- Works with thermal chucks and probe cards
- Versatile high and low power optics
- Optimized fast probing mode features