Analytical Wafer Probers
Our Analytical Wafer Probe stations are built for failure analysis, device characterisation and parametric testing. Available in semi-automatic and manual configurations, with wafer support up to 300mm.
Every station can be configured with a full range of accessories – manipulators, enclosures, antivibration tables, thermal chucks, optics and control software. If your requirements change, the platform can be upgraded to match.
Semi Automatic 200mm & 300mm Probing systems
A versatile semi-automatic platform for 200 mm and 300 mm wafers. Suited to failure analysis, device characterisation, RF, high voltage, DC and low leakage applications. Temperature range –60°C to +400°C.
Key features:
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Full and partial wafer support to 200 mm or 300 mm
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Motorised and manually driven manipulators
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Compatible with cantilever probe cards
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Programmable and manual microscope mounts
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Optional software for automated test routines
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Lasers for cutting and marking
Semi Automatic 200mm-HV – high voltage system
Specifically configured for power semiconductor test. Delivers accurate, low contact resistance measurements at high currents, with full safety provision for high voltage applications.
Key features:
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High current probing for DC and pulsed applications
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Kelvin sense measurements
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Low contact resistance reverse side contact
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Low leakage and high voltage capability
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Suitable for thin wafer handling
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Easily integrated with a wide range of test instruments
Manual 200mm & 300mm – Systems
A highly stable manual platform for 200 mm and 300 mm wafers. Cost-effective and reliable for failure analysis, device characterisation and inline process verification.
Key features:
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Full and partial wafer support to 200 mm or 300 mm
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Temperature probing from –60°C to +400°C
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Front-facing controls with fine and coarse adjustment
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Bespoke enclosures
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Accepts cantilever probe cards and replaceable probes
Manual, entry level probing system
A compact, cost-effective manual prober for wafers up to 200 mm. Straightforward to use and maintain, with room to grow through accessories and upgrades.
Key features:
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Wafer support up to 200 mm
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Precision manual XY stage with theta rotation
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Accepts thermal chucks and cantilever probe cards
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High and low power optics options
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Fast probe mode available
Accessories
All analytical probers are supported by a full range of accessories including manipulators, environmental enclosures, antivibration tables, LabMaster control software, thermal chucks and optics.